Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition
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چکیده
منابع مشابه
Mechanical properties of atomic layer deposition-reinforced nanoparticle thin films.
Nanoparticle thin films (NTFs) exhibit multifunctionality, making them useful for numerous advanced applications including energy storage and conversion, biosensing and photonics. Poor mechanical reliability and durability of NTFs, however, limit their industrial and commercial applications. Atomic layer deposition (ALD) represents a unique opportunity to enhance the mechanical properties of NT...
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ژورنال
عنوان ژورنال: physica status solidi (a)
سال: 2020
ISSN: 1862-6300,1862-6319
DOI: 10.1002/pssa.202000319